Coating and film deposition equipment for structural components
Product Introduction
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The coating and film deposition equipment for structural components adopts the physical vapor deposition (PVD) technology. This technology vaporizes the surface of solid material sources into gaseous atoms, molecules or partially ionizes them into ions, and then deposits thin films with special functions on the surface of the substrate through low-pressure gas or plasma.
The PVD technology is widely used in fields such as aerospace, light industry and materials. It can be used to prepare film layers with characteristics like wear resistance, corrosion resistance, electrical conductivity, insulation and lubrication.
Advantages and benefits
Coatings can be prepared by profile scanning according to the product structure；
The film layers are uniform and dense；
It has excellent adhesion.
Technical indicators
| Device Model | SP-2020ASI | SP-2030SI | SP-2540SI | SP-3050SI |
| Vacuum Chamber Size (mm) | 2000×2000 | 2000×3000 | 2500×4000 | 3000×5000 |
| Maxium vacuum | 5.0E-4Pa | |||
| Air Extraction time | Ambient Pressure to 5.0E-3Pa in less than 30mins | |||
| Pressure Rise Rate | 1h≤0.5Pa | |||
| Vacuum Pump Set | Mechanical pump + Roots pump + Diffusion pump / Molecular pump | |||
| Heating System | Profile-following heater,adjustable and controllable from room temperature to 300℃（PID temperature control） | |||
| Air lnjection System | Mass flow controller(1-8 set) | |||
| Target | Planar target、Cylindrical rotating target 、arc target、ion source | |||
| Power Supply | MF Poert Supply、DC Power Supply、Arc Power Supply、Ion Power Supply | |||
| Workpiece Rotation Method | Profile-following motion / Rotational motion linked with the target. | |||
| Operating Method | Manual+Semi-Automatic+Fully Automatic+PLC+IPC | |||
| Note | Specifications can be fully customized according to customer's product and recipe requirements | |||
Application area
Fax：86-10-83865286
Postal Code：101102
Add：No. 35 Jingsheng South Second Street, Jinqiao Technology Industrial Base, Majuqiao Town, Tongzhou District, Beijing
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