Scientific Research Coating Equipment
Product Introduction
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Experimental vacuum coating equipment has the characteristics of beautiful appearance, compact structure, diverse performance, simple and reliable operation, and low power consumption. It can realize evaporation coating, magnetron sputtering coating, HiPIMS, RF, Arc coating, CVD, PECVD and other processes. It can be controlled manually, semi-automatically and fully automatically. There are many sizes and models to choose from.
Advantages and benefits
Functions can be flexibly combined;
Customized production can be carried out in combination with users to meet experimental needs;
Diversified process programming;
Provide joint experimental development services.
Technical indicators
Device Model | SP-0305AS | SP-0506AS | SP-0608ASI | SP-1005ASI |
Vacuum Chamber Size (mm) | 300×500 | 500×600 | 600×800 | 1000×500 |
Extreme Vacuum | 6.0E-5Pa | |||
Air Extraction Time | Ambient Pressure to 5.0E-3Pa in less than 10 mins | |||
Pressure Rise Rate | 1h≤0.5Pa | |||
Vacuum Pump Set | Mechanical pump,Roots pump,Molecular pump,Maintaining pump | |||
Heating System | Room temperature to 500℃ (PID controlled) | |||
Air lnjection System | Mass flow controller (1-4 set) | |||
Targets | lnductive coupled lonization,Elctric Beam Evaporation | |||
Power Supply | lnductive Heating Power supply，Electric Gun Power Supply,MF Sputtering Power Supply, HiPIMS Power Supply, Arc Power Supply,Bias Power Supply, DC Sputtering Power Supply,Radio Frequency Power Supply | |||
Workpiece Rotation Method | Revolution+rotation frequency conversion infinite speed regulation | |||
Operating Method | Manual+Semi-Automatic+Fully Automatic+PLC+IPC | |||
Note | Specifications can be fully customized according to customer's product and recipe requirements | |||
application area
Fax：86-10-83865286
Postal Code：101102
Add：No. 35 Jingsheng South Second Street, Jinqiao Technology Industrial Base, Majuqiao Town, Tongzhou District, Beijing
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